A bubble-powered micro-rotor: conception, manufacturing, assembly and characterization

A steady fluid flow, called microstreaming, can be generated in the vicinity of a micro-bubble excited by ultrasound. In this paper, we use this phenomenon to assemble and power a microfabricated rotor at rotation speeds as high as 625 rpm. The extractible power is estimated to be of the order of a few femtowatts. A first series of experiments with uncontrolled rotor shapes is presented, demonstrating the possibility of this novel actuation scheme. A second series of experiments with 65 μm rotors micromanufactured in SU-8 resin is then presented. Variables controlling the rotation speed and rotor stability are investigated, such as the bubble diameter, the acoustic excitation frequency and amplitude and the rotor geometry. Finally, an outlook is provided on developing this micro-rotor into a MEMS-based motor capable of delivering tunable, infinitesimal rotary power at the microscale. M This article features online multimedia enhancements (Some figures in this article are in colour only in the electronic version)